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Highly decoupled single-crystal silicon resonators: an approach for the intrinsic quality factor
Foulgoc, Baptiste Le, Bourouina, Tarik, Traon, Olivier Le, Bosseboeuf, Alain, Marty, Frédéric, Breluzeau, Cédric, Grandchamp, Jean-Paul, Masson, StèveVolume:
16
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/16/6/S08
Date:
June, 2006
File:
PDF, 1.08 MB
english, 2006