[IEEE 25th International Reliability Physics Symposium - San Diego, CA, USA (1987.04.7-1987.04.9)] 25th International Reliability Physics Symposium - Highly Reliable Trench Capacitor With SiO2/Si3N4/SiO2 Stacked Film
Watanabe, T., Goto, N., Yasuhisa, N., Yanase, T., Tanaka, T., Shinozaki, S.Year:
1987
Language:
english
DOI:
10.1109/IRPS.1987.362154
File:
PDF, 4.84 MB
english, 1987