Study of Low-Temperature Oxidation in Au/Si and Cu/Si...

Japanese Journal of Applied Physics 1992 / 3 Vol. 31; Iss. Part 2, No

Study of Low-Temperature Oxidation in Au/Si and Cu/Si Systems by 7-MeV Alpha Particle Backscattering Analysis

Li, Jian, Yonezawa, Hiroki, Shigematsu, Toshio
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Volume:
31
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.31.L210
Date:
March, 1992
File:
PDF, 547 KB
1992
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