[IEEE 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - San Francisco, CA, USA (2014.01.26-2014.01.30)] 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - A UHF 4th-order band-pass filter based on contour-mode PZT-on-Silicon resonators
Yagubizade, Hadi, Darvishi, Milad, Elwenspoek, Miko C., Tas, Niels R.Year:
2014
Language:
english
DOI:
10.1109/MEMSYS.2014.6765872
File:
PDF, 1.49 MB
english, 2014