A planar asymmetric Schottky barrier source/drain structure...

A planar asymmetric Schottky barrier source/drain structure for nano-scale MOSFETs

Sun, Lei, Li, Ding-Yu, Zhang, Sheng-Dong, Liu, Xiao-Yan, Wang, Yi, Han, Ru-Qi
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Volume:
21
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/21/5/007
Date:
May, 2006
File:
PDF, 245 KB
english, 2006
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