Advanced Residual Stress Analysis and FEM Simulation on Heteroepitaxial 3C–SiC for MEMS Application
Anzalone, R., D'Arrigo, G., Camarda, M., Locke, C., Saddow, S. E., La Via, F.Volume:
20
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2011.2127451
Date:
June, 2011
File:
PDF, 608 KB
english, 2011