[IEEE 2013 21st Iranian Conference on Electrical Engineering (ICEE) - Mashhad, Iran (2013.05.14-2013.05.16)] 2013 21st Iranian Conference on Electrical Engineering (ICEE) - Study of a high sensitivity transverse comb-drive as small force sensor
Ahmadi, S. A., Fanaei, S. T., Barakati, S. M.Year:
2013
Language:
english
DOI:
10.1109/IranianCEE.2013.6599679
File:
PDF, 756 KB
english, 2013