A new fabrication process for ultra-thick microfluidic...

Journal of Micromechanics and Microengineering 2002 / 9 Vol. 12; Iss. 5

A new fabrication process for ultra-thick microfluidic microstructures utilizing SU-8 photoresist

Lin, Che-Hsin, Lee, Gwo-Bin, Chang, Bao-Wen, Chang, Guan-Liang
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Volume:
12
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/12/5/312
Date:
September, 2002
File:
PDF, 807 KB
english, 2002
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