High performance platinum-silicided p-type Schottky barrier...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2011 Vol. 29; Iss. 3

High performance platinum-silicided p-type Schottky barrier metal-oxide-semiconductor field-effect transistors scaled down to 30 nm

Jun, Myungsim, Park, Youngsam, Hyun, Younghoon, Zyung, Taehyoung, Jang, Moongyu, Choi, Sung-Jin
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Volume:
29
Year:
2011
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3592483
File:
PDF, 550 KB
english, 2011
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