[IEEE Technical Digest IEEE Solid-State Sensor and Actuator Workshop - Hilton Head Island, SC, USA (22-25 June 1992)] Technical Digest IEEE Solid-State Sensor and Actuator Workshop - Polysilicon resonant microbeam technology for high performance sensor applications
Guckel, H., Rypstat, C., Nesnidal, M., Zook, J.D., Burns, D.W., Arch, D.K.Year:
1992
DOI:
10.1109/SOLSEN.1992.228303
File:
PDF, 411 KB
1992