Electric field reversals in the sheath region of capacitively coupled radio frequency discharges at different pressures
Schulze, J, Donkó, Z, Heil, B G, Luggenhölscher, D, Mussenbrock, T, Brinkmann, R P, Czarnetzki, UVolume:
41
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/41/10/105214
Date:
May, 2008
File:
PDF, 2.78 MB
english, 2008