New Technique for Forming Continuous, Smooth, and Uniform Ultrathin (3 nm) PtSi Layers
Donaton, R. A.Volume:
2
Year:
1999
Language:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/1.1390781
File:
PDF, 139 KB
english, 1999