Sub-nanometer stable precision MEMS clamping mechanism...

Sub-nanometer stable precision MEMS clamping mechanism maintaining clamp force unpowered for TEM application

Brouwer, D M, Jong, B R de, Soemers, H M J R, Dijk, J Van
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
16
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/16/6/S02
Date:
June, 2006
File:
PDF, 510 KB
english, 2006
Conversion to is in progress
Conversion to is failed