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Sub-nanometer stable precision MEMS clamping mechanism maintaining clamp force unpowered for TEM application
Brouwer, D M, Jong, B R de, Soemers, H M J R, Dijk, J VanVolume:
16
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/16/6/S02
Date:
June, 2006
File:
PDF, 510 KB
english, 2006