[IEEE 2013 25th International Conference on Indium Phosphide and Related Materials (IPRM) - Kobe, Japan (2013.05.19-2013.05.23)] 2013 International Conference on Indium Phosphide and Related Materials (IPRM) - Impact of Al2O3 ALD temperature on Al2O3/GaSb metal-oxide-semiconductor interface properties
Yokoyama, Masafumi, Asakura, Yuji, Yokoyama, Haruki, Takenaka, Mitsuru, Takagi, ShinichiYear:
2013
Language:
english
DOI:
10.1109/ICIPRM.2013.6562633
File:
PDF, 547 KB
english, 2013