MEMS/NEMS based on mono-, nano-, and ultrananocrystalline...

MRS Bulletin 2014 / 06 Vol. 39; Iss. 6

MEMS/NEMS based on mono-, nano-, and ultrananocrystalline diamond films

Sumant, Anirudha V., Auciello, Orlando, Liao, Meiyong, Williams, Oliver A.
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Volume:
39
Language:
english
Journal:
MRS Bulletin
DOI:
10.1557/mrs.2014.98
Date:
June, 2014
File:
PDF, 457 KB
english, 2014
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