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Monolithically integrated glass microlens scanner using a thermal reflow process
Yoo, Sunghyun, Ha, Joon-Geun, Jin, Joo-Young, Ji, Chang-Hyeon, Kim, Yong-KweonVolume:
23
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/23/6/065012
Date:
June, 2013
File:
PDF, 1.82 MB
english, 2013