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Non-planar substrate effect on the interface trap capacitance of metal-oxide-semiconductor structures with ultra thin oxides
Tseng, Po-Hao, Hwu, Jenn-GwoVolume:
112
Year:
2012
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4761972
File:
PDF, 2.84 MB
english, 2012