Optical detection of the coriolis force on a silicon micromachined gyroscope
V. Annovazzi-lodi, S. Merlo, M. Norgia, G. Spinola, B. Vigna, S. ZerbiniVolume:
12
Year:
2003
Language:
english
DOI:
10.1109/JMEMS.2003.817893
File:
PDF, 610 KB
english, 2003