Optical detection of the coriolis force on a silicon...

Optical detection of the coriolis force on a silicon micromachined gyroscope

V. Annovazzi-lodi, S. Merlo, M. Norgia, G. Spinola, B. Vigna, S. Zerbini
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Volume:
12
Year:
2003
Language:
english
DOI:
10.1109/JMEMS.2003.817893
File:
PDF, 610 KB
english, 2003
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