Turnover Temperature Point in Extensional-Mode Highly Doped Silicon Microresonators
Shahmohammadi, Mohsen, Harrington, Brandon P., Abdolvand, RezaVolume:
60
Language:
english
Journal:
IEEE Transactions on Electron Devices
DOI:
10.1109/TED.2013.2243451
Date:
March, 2013
File:
PDF, 1.87 MB
english, 2013