Effects of Nitridation on 4H-SiC MOSFETs Fabricated on Various Crystal Faces
Nanen, Yuichiro, Kato, Muneharu, Suda, Jun, Kimoto, TsunenobuVolume:
60
Language:
english
Journal:
IEEE Transactions on Electron Devices
DOI:
10.1109/TED.2012.2236333
Date:
March, 2013
File:
PDF, 151 KB
english, 2013