Nanoparticle formation in microchannel glass by plasma...

Journal of Applied Physics 2003 Vol. 93; Iss. 9

Nanoparticle formation in microchannel glass by plasma enhanced chemical vapor deposition

D. N. Mcilroy, J. Huso, Y. Kranov, J. Marchinek, C. Ebert, S. Moore, E. Marji, R. Gandy, Y. Hong, M. Grant Norton, E. Cavalieri, R. Benz, B. L. Justus, A. Rosenberg
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Volume:
93
Year:
2003
Language:
english
DOI:
10.1063/1.1564881
File:
PDF, 765 KB
english, 2003
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