Influence of RF Bias on the Deposition of CrN Studied by OES
Z. G. Zhang, O. Rapaud, N. Bonasso, D. Mercs, C. Dong, C. CoddetVolume:
10
Year:
2008
Language:
english
Pages:
6
DOI:
10.1002/adem.200800053
File:
PDF, 387 KB
english, 2008