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Studies of material and process compatibility in developing compact silicon vapor chambers
Cai, Qingjun, Bhunia, Avijit, Tsai, Chialun, Kendig, Martin W, DeNatale, Jeffrey FVolume:
23
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/23/6/065003
Date:
June, 2013
File:
PDF, 1.62 MB
english, 2013