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Preparation of highly oriented polycrystalline AlN thin films deposited on glass at oblique-angle incidence
Rodríguez-Navarro, A., Otañno-Rivera, W., García-Ruiz, J. M., Messier, R., Pilione, L. J.Volume:
12
Language:
english
Journal:
Journal of Materials Research
DOI:
10.1557/JMR.1997.0232
Date:
July, 1997
File:
PDF, 215 KB
english, 1997