Surface and Bulk-Silicon-Micromachined Optical Displacement Sensor Fabricated With the SwIFT-Lite™ Process
Hall, N.A., Okandan, M., Degertekin, F.L.Volume:
15
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2006.878884
Date:
August, 2006
File:
PDF, 1.44 MB
english, 2006