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Young's modulus extraction of epitaxial heterostructure AlGaN/GaN for MEMS application
Ben Amar, Achraf, Faucher, Marc, Brandli, Virginie, Cordier, Yvon, Théron, DidierVolume:
211
Language:
english
Journal:
physica status solidi (a)
DOI:
10.1002/pssa.201330339
Date:
July, 2014
File:
PDF, 429 KB
english, 2014