Influences of Ta passivation layers on the fatigue behavior of thin Cu films
Wang, Dong, Gruber, Patric A., Volkert, Cynthia A., Kraft, OliverVolume:
610
Language:
english
Journal:
Materials Science and Engineering: A
DOI:
10.1016/j.msea.2014.05.024
Date:
July, 2014
File:
PDF, 1.70 MB
english, 2014