AFM imaging and fractal analysis of surface roughness of AlN epilayers on sapphire substrates
Dallaeva, Dinara, Ţălu, Ştefan, Stach, Sebastian, Škarvada, Pavel, Tománek, Pavel, Grmela, LubomírVolume:
312
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2014.05.086
Date:
September, 2014
File:
PDF, 1.97 MB
english, 2014