Surface roughness and optoelectronic properties of...

Materials Science in Semiconductor Processing 2014 / 10 Vol. 26

Surface roughness and optoelectronic properties of intrinsic and doped nc-Si:H prepared by Rf-magnetron sputtering at low temperature

Belfedal, A., Benlakehal, D., Bouizem, Y., Baghdad, R., Clin, M., Zeinert, A., Durand-Drouhin, O., Sib, J.D., Chahed, L., Zellama, K.
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Volume:
26
Language:
english
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2014.04.033
Date:
October, 2014
File:
PDF, 746 KB
english, 2014
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