![](/img/cover-not-exists.png)
A micromachined gas inertial sensor based on thermal expansion
Zhu, Rong, Cai, Songlin, Ding, Henggao, Yang, Yong Jun, Su, YanVolume:
212
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2014.01.041
Date:
June, 2014
File:
PDF, 2.42 MB
english, 2014