Low temperature and large area deposition of...

Diamond and Related Materials 2014 / 08 Vol. 47

Low temperature and large area deposition of nanocrystalline diamond films with distributed antenna array microwave-plasma reactor

Mehedi, H.-A., Achard, J., Rats, D., Brinza, O., Tallaire, A., Mille, V., Silva, F., Provent, Ch., Gicquel, A.
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Volume:
47
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2014.05.004
Date:
August, 2014
File:
PDF, 4.15 MB
english, 2014
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