Maskless nano-implant of 20keV Ga+ in bulk Si(100)...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2014 / 12 Vol. 341

Maskless nano-implant of 20keV Ga+ in bulk Si(100) substrates

Milazzo, R.G., D’Arrigo, G., Mio, A.M., Rimini, E., Spinella, C., Peto, L., Nadzeyka, A., Bauerdick, S.
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Volume:
341
Language:
english
Journal:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
DOI:
10.1016/j.nimb.2013.11.044
Date:
December, 2014
File:
PDF, 1.95 MB
english, 2014
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