![](/img/cover-not-exists.png)
Characterisation of aluminium nitride films and surface acoustic wave devices for microfluidic applications
Zhou, J., DeMiguel-Ramos, M., Garcia-Gancedo, L., Iborra, E., Olivares, J., Jin, H., Luo, J.K., Elhady, A.S., Dong, S.R., Wang, D.M., Fu, Y.Q.Volume:
202
Language:
english
Journal:
Sensors and Actuators B: Chemical
DOI:
10.1016/j.snb.2014.05.066
Date:
October, 2014
File:
PDF, 1.03 MB
english, 2014