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Analytical Solution of the Continuous Cellular Automaton for Anisotropic Etching
Gosalvez, M.A., Yan Xing,, Sato, K.Volume:
17
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2008.916339
Date:
April, 2008
File:
PDF, 2.58 MB
english, 2008