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Preparation and Microstructure of Tantalum Nitride Thin...

Preparation and Microstructure of Tantalum Nitride Thin Film by Cathodic Arc Deposition

Li, Li, Er-Wu, Niu, Guo-Hua, Lv, Wen-Ran, Feng, Wei-Chao, Gu, Guang-Liang, Chen, Gu-Ling, Zhang, Song-Hua, Fan, Chi-Zi, Liu, Si-Ze, Yang
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Volume:
23
Language:
english
Journal:
Chinese Physics Letters
DOI:
10.1088/0256-307X/23/11/037
Date:
November, 2006
File:
PDF, 297 KB
english, 2006
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