Preparation and Microstructure of Tantalum Nitride Thin Film by Cathodic Arc Deposition
Li, Li, Er-Wu, Niu, Guo-Hua, Lv, Wen-Ran, Feng, Wei-Chao, Gu, Guang-Liang, Chen, Gu-Ling, Zhang, Song-Hua, Fan, Chi-Zi, Liu, Si-Ze, YangVolume:
23
Language:
english
Journal:
Chinese Physics Letters
DOI:
10.1088/0256-307X/23/11/037
Date:
November, 2006
File:
PDF, 297 KB
english, 2006