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Atomically Flat Low-Resistive Germanide Contacts Formed by Laser Thermal Anneal
Shayesteh, Maryam, Huet, Karim, Toque-Tresonne, Ines, Negru, Razvan, Daunt, Chris L. M., Kelly, Niall, O'Connell, Dan, Yu, Ran, Djara, Vladimir, Carolan, Patrick B., Petkov, Nikolay, Duffy, RayVolume:
60
Language:
english
Journal:
IEEE Transactions on Electron Devices
DOI:
10.1109/TED.2013.2263336
Date:
July, 2013
File:
PDF, 1.61 MB
english, 2013