Doping Process for 3-D N-Type Trench Transistors-2-D Cross-Sectional Doping Profiling Study
Qin, Shu, Wang, Zhouguang, Hu, Yongjun Jeff, McTeer, AllenVolume:
60
Language:
english
Journal:
IEEE Transactions on Electron Devices
DOI:
10.1109/TED.2013.2264164
Date:
July, 2013
File:
PDF, 2.30 MB
english, 2013