Investigation of Charge Injection and Relaxation in...

IEEE Transactions on Electron Devices 2013 / 07 Vol. 60; Iss. 7

Investigation of Charge Injection and Relaxation in Multilayer Dielectric Stacks for Capacitive RF MEMS Switch Application

Li, Gang, Zhang, Wendong, Li, Pengwei, Sang, Shengbo, Hu, Jie, Chen, Xuyuan
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Volume:
60
Language:
english
Journal:
IEEE Transactions on Electron Devices
DOI:
10.1109/TED.2013.2263252
Date:
July, 2013
File:
PDF, 1.31 MB
english, 2013
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