[IEEE 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) - Hyogo, Japan (2007.1.21-2007.1.25)] 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) - Non-isothermal micromechanical resonators
Chandorkar, S. A., Mehta, H., Agarwal, M., Hopcroft, M.A., Jha, C. M., Candler, R.N., Yama, G., Bahl, G., Kim, B., Melamud, R., Goodson, K. E., Kenny, T. W.Year:
2007
Language:
english
DOI:
10.1109/MEMSYS.2007.4433138
File:
PDF, 1.30 MB
english, 2007