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Design and Fabrication of a Planar Three-DOFs MEMS-Based Manipulator
B. R. De Jong, D. M. Brouwer, M. J. De Boer, H. V. Jansen, H. M. J. R. Soemers, G. J. M. KrijnenVolume:
19
Year:
2010
Language:
english
DOI:
10.1109/JMEMS.2010.2067196
File:
PDF, 1.37 MB
english, 2010