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[IEEE 2013 IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S) (Formerly known as SOI Conference) - Monterey, CA, USA (2013.10.7-2013.10.10)] 2013 IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S) - Fin width scaling for improved short channel control and performance in aggressively scaled channel length SOI finFETs
Paul, Abhijeet, Yeh, Chun-chen, Standaert, Theodorus, Johnson, Jeffrey. B., Bryant, Andres, Tripathi, Neeraj, Tsutsui, Gen, Yamashita, Tenko, Basker, Veeraraghvan S., Faltermeier, Johnathan, Cho, Jin,Year:
2013
Language:
english
DOI:
10.1109/S3S.2013.6716521
File:
PDF, 622 KB
english, 2013