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[IEEE 2013 IEEE Sensors - Baltimore, MD, USA (2013.11.3-2013.11.6)] 2013 IEEE SENSORS - Development of micro-hotplate with TaN heater based Cu-doped SnO2 gas sensor for low concentration of H2S gas
Chiou, Jin-Chern, Tsai, Shang-Wei, Lin, Chia-Yang, Chiou, Jin-ChernYear:
2013
Language:
english
DOI:
10.1109/ICSENS.2013.6688151
File:
PDF, 1.16 MB
english, 2013