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[IEEE 2006 European Solid-State Device Research Conference - Montreux, Switzerland (2006.09.19-2006.09.21)] 2006 European Solid-State Device Research Conference - High Performance 65nm SOI Transistors Using Laser Spike Annealing
Yamashita, Tenko, Fisher, Philip, Gluschenkov, Oleg, Kimura, Hideki, Ramachandran, Ravikumar, Mocuta, Anda, Kluth, Jon, Kawamura, Takahiro, Onishi, Katsunori, Fried, David, Narasimha, Shreesh, Brown,Year:
2006
Language:
english
DOI:
10.1109/ESSDER.2006.307709
File:
PDF, 3.61 MB
english, 2006