![](/img/cover-not-exists.png)
A flexible platform for simulations of sputtering hollow cathode discharges for laser applications
Mihailova, D, Grozeva, M, Hagelaar, G J M, van Dijk, J, Brok, W J M, van der Mullen, J J A MVolume:
41
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/41/24/245202
Date:
December, 2008
File:
PDF, 630 KB
english, 2008