A flexible platform for simulations of sputtering hollow...

A flexible platform for simulations of sputtering hollow cathode discharges for laser applications

Mihailova, D, Grozeva, M, Hagelaar, G J M, van Dijk, J, Brok, W J M, van der Mullen, J J A M
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Volume:
41
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/41/24/245202
Date:
December, 2008
File:
PDF, 630 KB
english, 2008
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