[IEEE 2007 International Microsystems, Packaging, Assembly and Circuits Technology - Taipei, Taiwan (2007.10.1-2007.10.3)] 2007 International Microsystems, Packaging, Assembly and Circuits Technology - CMOS-MEMS micro sensors using mesoporous carbon immobilized by the dielectrophoresis process for gas detection
Kuan-Hsun Liao,, Chih-Cheng Lu,, Chueh-Yang Liu,Year:
2007
Language:
english
DOI:
10.1109/IMPACT.2007.4433586
File:
PDF, 931 KB
english, 2007