Cylindrical DC Magnetron Sputtering Assisted by Microwave Plasma
Yonesu, Akira, Kato, Takashi, Takemoto, Hiroki, Nishimura, Naoki, Yamashiro, YasumasaVolume:
38
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.38.4326
Date:
July, 1999
File:
PDF, 366 KB
english, 1999