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Spin-Coated Periodic Mesoporous Organosilica Thin Films—Towards a New Generation of Low-Dielectric-Constant Materials
B. D. Hatton, K. Landskron, W. Whitnall, D. D. Perovic, G. A. OzinVolume:
15
Year:
2005
Language:
english
Pages:
7
DOI:
10.1002/adfm.200400221
File:
PDF, 398 KB
english, 2005