Design, fabrication and testing of a silicon-on-insulator (SOI) MEMS parallel kinematics XY stage
Dong, Jingyan, Mukhopadhyay, Deepkishore, Ferreira, Placid MVolume:
17
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/17/6/008
Date:
June, 2007
File:
PDF, 774 KB
english, 2007