Design, fabrication and testing of a silicon-on-insulator...

Design, fabrication and testing of a silicon-on-insulator (SOI) MEMS parallel kinematics XY stage

Dong, Jingyan, Mukhopadhyay, Deepkishore, Ferreira, Placid M
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Volume:
17
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/17/6/008
Date:
June, 2007
File:
PDF, 774 KB
english, 2007
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