Pattern-Transfer Fidelity in Soft Lithography: The Role of Pattern Density and Aspect Ratio
T.-W. Lee, O. Mitrofanov, J. W. P. HsuVolume:
15
Year:
2005
Language:
english
Pages:
6
DOI:
10.1002/adfm.200400295
File:
PDF, 407 KB
english, 2005