Pattern-Transfer Fidelity in Soft Lithography: The Role of...

Pattern-Transfer Fidelity in Soft Lithography: The Role of Pattern Density and Aspect Ratio

T.-W. Lee, O. Mitrofanov, J. W. P. Hsu
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
15
Year:
2005
Language:
english
Pages:
6
DOI:
10.1002/adfm.200400295
File:
PDF, 407 KB
english, 2005
Conversion to is in progress
Conversion to is failed