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High Quality AlN Thin Films Deposited by Middle-Frequency Magnetron Sputtering at Room Temperature
Li, Chuan, Shu, Lin, He, Li Jun, Liu, Xing ZhaoVolume:
787
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.787.227
Date:
April, 2014
File:
PDF, 672 KB
english, 2014